pu930_clean_gas_scfm

The goal of this metric is to assess whether the gas coming out of the PU930 polisher is clean enough to meet the spec requirements.

The purifier is made up of three beds (A, B, C), and they operate one at a time. So here I we need four permutations: clean gas flow rate tracking for each of the beds individually, and also for the three beds as a whole.

formula

The primary logic for the beds

pu930X_clean_gas_scfm = FT_322 IF PU930AMODE_STATE = 1 AND QMS2_A13_N2 <= 4 0 IF PU930AMODE_STATE = 1 AND QMS2_A13_N2 > 4 NaN IF PU930AMODE_STATE != 1

pu930_clean_gas_scfm = pu930a_clean_gas_scfm + pu930b_clean_gas_scfm + pu930c_clean_gas_scfm